تحلیل و طراحی حسگر فشار داخل جمجمه پیزورزیستیو جدید با حساسیت بالا

ایمانی, فائزه; عزیزالله گنجی, بهرام; جعفری تلوکلائ, رمضانعلی

تحلیل و طراحی حسگر فشار داخل جمجمه پیزورزیستیو جدید با حساسیت بالا

نوع مقاله : مقاله پژوهشی

نویسندگان

¹ دانشگاه صنعتی نوشیروانی بابل

² دانشگاه صنعتی نوشیروانی ، بابل

چکیده

در این مقاله ،حسگر فشار جمجمه پیزورزیستیو ماشینکاری میکرونی جدید برای فشار بین صفر تا mmHg225 برای بیماران آسیب دیده جمجمه ای از جمله تومور های مغزی ،پارکینسون یا صدماتی که در اثر تصادف به جمجمه وارد می شود، تحلیل و طراحی شده است که به روش المان محدود با استفاده از نرم افزار intellisuit شبیه سازی شده است. در حسگر جدید جنس ، ابعاد دیافراگم و ساختار پیزورزیستور‌ها جهت زیست سازگاری ، انعطاف پذیری ، کوچک سازی، ساخت ساده و افزایش حساسیت تغییر یافته اند. شش دیافراگم با جنس های متفاوت از مواد کامپوزیت و غیر کامپوزیت مورد بررسی و مقایسه قرار گرفته اندکه در نتیجه ماده‌ای کامپوزیت با استحکام کششی بالاتر انتخاب شده است. سپس طراحی برای چهار پیزورزیستور که به صورت پل‌وتسون بسته شده اند انجام گرفته است که دو عدد از این پیزورزیستورها به صورت طولی و بدون پیچ قرار گرفته‌اند و دو عدد دیگر به صورت عرضی و دارای یک پیچ هستند تا در مناطق حداکثر تنش قرار گیرند و حساسیتشان افزایش یابد . برای مشاهده تاثیر طول پیزورزیستور ها ، شبیه‌سازی با طول پیزورزیستور‌های مختلف با ابعاد دیافراگم یکسان انجام شده است و نتایج نشان می‌دهد ساختار با طول پیزورزیستور µm300 حساسیت بالاتر (µv/mmHg1164/206)و کاملا خطی ارائه کرده است که نسبت به کارهای گذشته حساسیت بسیار بالایی دارد. همچنین از دیگر ویژگی‌های این ساختار آن است که که کلیه مواد مورد استفاده در حسگر زیست‌سازگارند تا بتوان بدون نگرانی در جمجمه قرارداد.

کلیدواژه‌ها

موضوعات

افزاره های میکروالکترو مکانیکی و نانو الکترومکانیکیMEMS & NEMS

عنوان مقاله [English]

Design and analysis of a Novel Piezoresistive INTRACRANIAL Pressure Sensor with High Sensitivity

نویسندگان [English]

Faezah Imani ¹
Bahram Azizollah Gangi ¹
Ramazan Ali jafari Talookolaei ²

¹ babol noshirvani university of technology

² Babol Noshirvani University of Technology

چکیده [English]

In this paper, a high sensitive piezoresistive intracranial MEMS (Micro Electro Mechanical system) pressure sensor was analyzed and designed for pressure rage of 0-225 mmHg (0-0.05 MPa). This sensor is designed to diagnose disease like Parkinson, brain edema, brain tumor along with other brain problems that could be seriously harmful to the patient. The MEMS technology can create a small size and high sensitive system in order to minimize the brain damages and complications. Enforcing pressure on diaphragm changes the piezoresistor’s resistance and causes a variation in output voltage. In the new sensor, however, the size and material of the diaphragm along with the structure of piezoresistors have been modified. Different materials were investigated and as a result, a substance with the highest tensile strength was chosen. Then the design was done for 4 piezoresistors forming a Wheatstone bridge while two of them are longitudinal without turn and the others are lateral containing a turn. The simulation was done using the finite element method for different piezoresistor lengths with same size. According to the results, a sensitivity of 206.1164 µv/mmHg is achieved with a completely linear output which shows a significant improvement compared with previous works. Furthermore, one of the important feature of this design is all materials used in new structure, including wires and piezoresistors, are biocompatible.

کلیدواژه‌ها [English]

piezoresistive pressure sensor
Wheatstone bridge
microelectromechanical
INTRACRANIAL pressure
biocompatible materials

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