نویسنده
دانشگاه صنعتی مالک اشتر
چکیده
کلیدواژهها
عنوان مقاله [English]
نویسنده [English]
According to various applications of variable capacitors in electrical devices, design and
fabrication of them are well developed. However, reaching to variable capacitor with
low drive voltage, short settling time, wide tuning range, smaller dimensions, and longer
lifetime, simultaneously, are difficult yet. In this paper, to satisfy these constraints,
particle swarm optimization (PSO) is used in designing MEMS capacitors. In spite of
gradient based algorithms, PSO achieves the absolute optimized value. The design
consists of modeling, simsulation, and optimization. In addition, a method is introduced
to realize the calling of simulation analysis programs designed by ANSYS parametric
design language (APDL) in MATLAB. This method is capable to design every
microelectromechanical two plate capacitors with electrostatic actuation. The proposed
design method is as follows: First, the desired amounts of parameters that are important
for the designers such as maximum drive voltage, initial capacitance, and limitations of
structure dimensions are fed to the program as inputs. Then, the program starts to design
a structure of variable capacitor and sends out the optimized structure design. The
simulation results show that tuning range of 50% is obtained with a lower actuation
voltage than the other works.
کلیدواژهها [English]
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