نویسنده
دانشگاه صنعتی مالک اشتر،
چکیده
کلیدواژهها
عنوان مقاله [English]
نویسنده [English]
One of the key components of a micro-sensor is the MEMS micro-heater. It has an
extremely wide range of applications such as gas sensors, pressure sensors and so on. In
this study, design and simulation of MEMS micro-heater is described. Heat transfer
analysis and FEM simulation using ConvetorWare software were performed to
determine the optimal design of micro-heater.The sensitivity and resolution of gas
sensors that use a micro-hotplate are dependent on the temperature uniformity of the
sensitive devicearea. There are several ways to create a uniform temperature distribution
on a micro-heater. In this paper the modification of micro-heater geometry is the
method used. Eight different heater geometries are simulated using ConvetorWare
software to determine which geometry can give the most uniform temperature
distribution. The simulations show that the heater geometry which Ω-shape results in
the most uniform heat distribution.
کلیدواژهها [English]
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