نویسندگان
1 دانشگاه ارومیه، کارشناسی ارشد مهندسی برق الکترونیک
2 دانشگاه جامع امام حسین (ع)، دکترای مهندسی برق الکترونیک
چکیده
کلیدواژهها
عنوان مقاله [English]
نویسندگان [English]
This paper presents design and simulation of a new MEMS switch for high frequencies applications. The
designed structure is an in-line capacitive shunt fixed-fixed beam switch. The switch has a cross-shaped
gold beam. It is optimized to have an excellent electromagnetic performance in the range of 20-100 GHz.
It provides very high isolation in the off-state, -23 dB at 20 GHz and -26 dB at 100 GHz. It also provides
low insertion loss in the on-state, -0.16 dB at 20 GHz and -1.2 dB at 80 GHz. The switch is designed in a
way that besides having a proper electromagnetic performance, the actuation voltage is also reduced. The
innovation of the design is the cross shape of the beam which causes the actuation voltage to decrease in
comparison with a simple structure. The actuation voltage is 30 V. Electromagnetic and mechanical
analysis and simulations of the switch are presented.
کلیدواژهها [English]
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