نویسندگان
1 دانشگاه بیرجند، هیئت علمی گروه الکترونیک، دکترای الکترونیک
2 دانشگاه بیرجند، دکترای مکانیک طراحی کاربردی
3 دانشگاه بیرجند، کارشناسی ارشد مکانیک
چکیده
کلیدواژهها
عنوان مقاله [English]
نویسندگان [English]
Nowadays, with the recent advances in micro-electro-mechanical systems (MEMS) fabrication technology, micromechanical resonators are used widely in wireless communication and navigation systems. In this paper, a micromechanical rectangular-plate resonator is introduced to increase the electromechanical coupling coefficient and enhanced the electrical performance of the micromechanical beam resonators. Moreover, the micromechanical rectangular-plate resonator with four conventional support beams is proposed to suppress the spurious mode effect. With regard to the dominated quality factor by anchor loss in some important applications including oscillators, electrical filters and gyroscopes, the closed-form expression is obtained for anchor loss quality factor in the plunging-mode vibrations of micromechanical rectangular-plate resonator. The findings are validated by comparing with experimental data. As far as there is an acceptable match between the analytical and experimental results, the proposed model is confirmed. According to the results, a novel T-shaped support beam design is proposed to enhance the anchor loss quality factor in the plunging-mode vibrations of micromechanical rectangular-plate resonators. In fact, the main purpose of this paper is the introduction of a novel design for support beams in micromechanical rectangular-plate resonators to achieve high quality factor, low motional resistance and low spurious modes. For this purpose, the two support beams are replaced with four T-shaped support beams. The results show that the anchor loss quality factor at the same resonant frequency is enhanced about 1.65 times. Moreover, the anchor loss quality factor at the constant resonant frequency increases with decreasing the width and increasing the length of T-shaped support beam.
کلیدواژهها [English]
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