Dual-Band and Adjustable HMSIW Resonator Using MEMS Technology

Document Type : Original Article

Authors

1 babol noshirvani university of technology

2 AmirKabir University of Technology

3 University of Tehran

Abstract

In this paper, one of the applications of MEMS technology in the field of telecommunication systems is introduced. For the first time, by using a variable MEMS capacitor in the CSRR resonator, a new method for adjusting and multi-banding telecommunication resonators is provided independently and simultaneously. In addition, the CSRR resonator is implemented on a HMSIW line and fabricated with the integrated circuit fabrication technology in order to reduce the noise caused by incomplete connection as well as area and loss and to integrate with the MEMS structure. Also, in this paper, the frequency behavior of structures was investigated by magnetic simulation with HFSS software. The results indicate that the transmission loss of the proposed structures is less than 1 dB and the return loss is greater than 15 dB. The proposed resonator works in the S-band frequency with the same frequency behavior as PCB board while its area is reduced by five times compared to the conventional structure by choosing the appropriate substrate for the integration. The proposed fabrication process for the adjustable and dual-band structure is presented which is based on existing integrated circuit technology.

Keywords

Main Subjects