Fabrication of Electrostatic Microactuator with SU-8 polymer for continuous diaphragm-based devices

اسفندیاری, مهرناز; اسدی, رضا; حیدری, پیام; شمسی, علیرضا

Fabrication of Electrostatic Microactuator with SU-8 polymer for continuous diaphragm-based devices

Authors

مهرناز اسفندیاری
رضا اسدی
پیام حیدری
علیرضا شمسی

Abstract

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Keywords

Microelectromechanical system
Electrostatic Actuators
Microactuators
SU-8

Volume 6, Issue 3 - Serial Number 22
October 2015
Pages 81-87

Fabrication of Electrostatic Microactuator with SU-8 polymer for continuous diaphragm-based devices

Volume 6, Issue 3 - Serial Number 22October 2015Pages 81-87

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Volume 6, Issue 3 - Serial Number 22
October 2015
Pages 81-87