نویسندگان
1 دانشگاه مالک اشتر-کارشناسی ارشد مهندسی برق الکترونیک
2 مرکز میکروالکترونیک دانشگاه مالک اشتر،کارشناسی ارشد
3 مرکز میکروالکترونیک دانشگاه مالک اشتر،کارشناسی ارشد برق
4 دانشگاه مالک اشتر،استادیار دانشکده برق و الکترونیک، دکتری الکترونیک
چکیده
کلیدواژهها
عنوان مقاله [English]
نویسندگان [English]
In this paper, Fabrication of Biological material detector, which detects using film bulk acoustic resonator (FBAR) technique, based on MEMS technology is introduced. Fabricated sensor consists of a thin oxide silicone membrane on which a piezoelectric layer is sandwiched between two gold electrodes. To detect specific Biological material, antibodies which are sensitive to goal Biological material were immobilized on the backside of FBAR sensor. Biological material detection is done through the mass sensing. When the specific Biological material is exposed to the sensor, it binds to the antibody on the sensor, causing a shift in the resonant frequency of the FBAR sensor. Some integrated circuit processes such as E-beam evaporation of Au, RF magnetron Sputtering of ZnO, wet etching process, and photolithography process are used to fabricate this detector. For fabrication of thin membrane, bulk micromachining method is used. In addition, to test the fabricated sensor, a new set up is designed and fabricated. With coating of anti-TNT layer on the backside of the fabricated sensor, it gets sensitive to TNT.
کلیدواژهها [English]
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